To meet various process requirements from growing IoT devices, Canon has released FPA-3030iWa, FPA-3030i5+ and FPA-3030EX6 steppers based on the new FPA-3030 platform that is upgrade to the proven FPA-3000 stepper platform. In this paper, we will introduce FPA-3030iWa stepper solutions to support IoT device manufacturing and report evaluation data and advantages.
Hiroyuki MIYAZAKI
CANON INC.
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Study of new stepper solutions for various IoT devices
Ken-Ichiro MORI, CANON INC.Noritoshi SAKAMOTO, CANON INC.Douglas SHELTON, CANON U.S.A. INC.Tomohiro OKAMOTO, CANON INC.Hiroyuki MIYAZAKI, CANON INC.Download Paper