Jason Thomen
Northrop Grumman Corporation
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6a.3 Reduction of Thin Film Stress-induced Micro-masking by Using Ti/Ni Hard Mask for High Power SiC Transistor Fabrication
Shamima Afroz, Northrop GrummanJason Thomen, Northrop Grumman CorporationJames Oliver, Northrop Grumman CorporationEvan Jones, Wolfspeed | A Cree Company