A single-layer optical filter made from thin film gallium phosphide (GaP) is envisioned and a fabrication flow is outlined, with current progress on process development reported. Ion-implantation is simulated and performed on bulk GaP with He+, followed by a field-assisted thermal bonding technique that simultaneously bonds a thin GaP film onto a borofloat glass substrate and removes the GaP substrate. The resulting thin films have consistent thickness, both within and between runs, and RMS surface roughness of < 10 nm. Dry-etch processes that further reduce the thin film material are characterized and designs for etching gratings into them are developed. This process is shown to be a reliable means of creating thin films of consistent thickness and smoothness in GaP, for the purpose of establishing visible wavelength filters for spectroscopic applications.
John Dallesasse
University of Illinois at Urbana-Chamapign
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Transfer of Thin Film Gallium Phosphide onto Glass for Integrable Optical Filters
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