Ju-Ai Ruan
Qorvo Inc.
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Backside Via Process of GaN Device Fabrication
Ju-Ai Ruan, Qorvo Inc.Craig Hall, QorvoCelicia Della-Morrow, TriQuint SemiconductorTom Nagle, Qorvo, Inc.Yinbao Yang, Qorvo, Inc. -
20.3 Some Process Development Issues for Ka-band GaN HEMT Individual Source Via (ISV)
Yongjie Cui, Qorvo Inc.John Hitt, Qorvo Inc.Tso-Min Chou, Qorvo Inc.Shuoqi Chen, Qorvo Inc.David Gonzalez, Qorvo, Inc.Yinbao Yang, Qorvo, Inc.Trish Smith, Qorvo Inc.Ju-Ai Ruan, Qorvo Inc.Vivian Li, Qorvo Inc.Cathy Lee, Qorvo Inc.Andrew Ketterson, Qorvo Inc.