K. Aoyama
Sumiden Semiconductor Materials Co., Ltd.,
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17.2.2023 Development of Laser Diode Grade Si-doped 8-inch GaAs Substrates
K. Shibata, Sumiden Semiconductor Materials Co., Ltd.,K. Aoyama, Sumiden Semiconductor Materials Co., Ltd.,M Nishioka, Sumiden Semiconductor Materials Co., Ltd.,K. Hashio, Sumiden Semiconductor Materials Co., Ltd.,F. Adachi, Sumiden Semiconductor Materials Co., Ltd.,S. Fujita, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, LtdYoshiaki Hagi, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, ItamiTomonori Morishita, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd -
7A.2 – Development of 6-Inch Indium Phosphide Substrates
Y. Oeki, Sumiden Semiconductor Materials Co., Ltd.K. Aoyama, Sumiden Semiconductor Materials Co., Ltd.,K. Hashio, Sumiden Semiconductor Materials Co., Ltd.,M. Adachi, Sumiden Semiconductor Materials Co., Ltd.,Y. Yoshizumi, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesYoshiaki Hagi, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, ItamiTomonori Morishita, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, LtdAbstract
In this paper, we report 6-inch indium phosphide (InP) substrates with very low dislocation density produced using SEI’s Vertical Boat (VB) method. The growth conditions have been optimized to reduce crystal defects.
