K. Mackenzie

Plasma-Therm LLC,

  • Productivity Improvement Using Plasma-based Die Singulation

    D. Pays-Volard, Plasma-Therm LLC,
    L. Martinez, Plasma-Therm LLC,
    K. Mackenzie, Plasma-Therm LLC,
    D. Lishan, Plasma-Therm LLC,
    Download Paper

  • Improving Corrosion Resistance of Plasma Etch Reactors Testing Anodize Coatings and Cleaning Methods

    K. Mackenzie, Plasma-Therm LLC,
    K. Pizzo, Plasma‐Therm
    E. Scott, Plasma‐Therm