Kai Shin
Northrop Grumman Corporation
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April 30, 2019 // 4:40pm – 5:00pm
5.4 Addressing 0.25 um T-Gate Lithography Defects through Data Driven Fit Model Analysis
Kai Shin, Northrop Grumman CorporationBrittany Janis, Northrop Grumman CorporationJohn Mason, Northrop Grumman CorporationGary Hughes, Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OHChristopher Ridpath, Northrop Grumman CorporationMegan Snook, Northrop Grumman CorporationAditya Gupta, Northrop Grumman CorporationH. George Henry, Northrop Grumman CorporationDavid Lawson, Northrop Grumman CorporationJim Arnold, Northrop Grumman Corporation