Kenneth D. Mackenzie

  • Recent Developments in Real-Time Thickness Control of Plasma Deposited Thin Film Dielectrics Using Optical Emission Interferometry

    Kenneth D. Mackenzie
    David J. Johnson
    Christopher W. Johnson
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  • High Throughput Stress-Controlled Silicon Nitride Deposition For Compound Semiconductor Device Manufacturing

    Kenneth D. Mackenzie
    Rohit Khanna, Plasma-Therm LLC