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Lam Luu-Henderson
Skyworks Solutions Inc.
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An E-beam Evaporation Deposition Process for Tantalum Nitride Thin Film Resistors
Lam Luu-Henderson, Skyworks Solutions Inc.Shiban Tiku, Skyworks Solutions, Inc.Hong ShenRichard BingleDaniel WeaverGary HuCristian Cismaru, Skyworks Solutions, Inc.Mike Sun, Skyworks Solutions, Inc.Skyworks Solutionsformerly of Skyworks Solutions -
Collector Contact Optimization in GaAs HBT Manufacturing
Lam Luu-Henderson, Skyworks Solutions Inc.Daniel WeaverHeather Knoedler, Skyworks SolutionsShiban Tiku, Skyworks Solutions, Inc. -
May 10, 2022 // 5:30pm
5.5 Optimizing Process Conditions for High Uniformity and Stability of Tantalum Nitride Films Stephanie Chang, Shiban Tiku, and Lam Luu-Henderson
Shiban K. Tiku, Skyworks Solutions, Inc.Lam Luu-Henderson, Skyworks Solutions Inc.Stephanie Chang, Skyworks Solutions Inc.Download Paper