Lunet Luna

U.S. Naval Research Laboratory

  • 13.1 High Aspect Ratio Vias in Silicon Carbide Etched by Inductively-Coupled Plasma

    Marko Tadjer, U.S. Naval Research Laboratory
    Lunet Luna, U.S. Naval Research Laboratory
    Eugene Imhoff, Naval Research Laboratory
    Karl D. Hobart, U.S. Naval Research Laboratory
    Fritz Kub, Naval Research Laboratory
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  • 18.3 Threshold Voltage Control by Tuning Charge in ZrO2 Gate Dielectrics for Normally-off AlGaN/GaN MOS-HEMTs

    Virginia Wheeler, U.S. Naval Research Laboratory
    David Shahin, University of Maryland
    Marko Tadjer, U.S. Naval Research Laboratory
    Lunet Luna, U.S. Naval Research Laboratory
    Andrew Koehler, Naval Research Laboratory
    Karl D. Hobart, U.S. Naval Research Laboratory
    Francis Kub, U.S. Naval Research Laboratory
    Charles Eddy, US Naval Research Laboratory
    Jr., Naval Research Laboratory
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  • 20.5 Characterization of ALD High-k Dielectrics in GaN and Ga2O3 Metal-Oxide-Semiconductor Systems

    David Shahin, University of Maryland
    Virginia Wheeler, U.S. Naval Research Laboratory
    Marko Tadjer, U.S. Naval Research Laboratory
    Lunet Luna, U.S. Naval Research Laboratory
    Andrew Koehler, Naval Research Laboratory
    Karl D. Hobart, U.S. Naval Research Laboratory
    Charles Eddy, US Naval Research Laboratory
    Jr., Naval Research Laboratory
    Fritz Kub, Naval Research Laboratory
    Aris Christou, University of Maryland-College Park
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