Manabu Okumura

Mitsubishi Electric Corporation, Melco Semiconductor Engineering Corp.

  • Moisture resistance of insulating films for compound semiconductor devices

    Tomoki Oku, Mitsubishi Electric Corporation, Melco Semiconductor Engineering Corp.
    Manabu Okumura, Mitsubishi Electric Corporation, Melco Semiconductor Engineering Corp.
    Masahiro Totsuka, Mitsubishi Electric Corporation, Melco Semiconductor Engineering Corp.
    Download Paper