Maria Alexandrova

ETH-Zurich

  • 20.11 Comparison of Ion-Milling and Ion-Sputtering to Remove Edge Roughness of EBL Defined Emitter Metallization in InP/GaAsSb DHBTs

    Wei Quan, ETH-Zurich
    Ralf Flueckiger, ETH-Zurich
    Maria Alexandrova, ETH-Zurich
    Colombo Bolognesi, ETH-Zurich
    Download Paper