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Mark Benjamin
Lehighton Electronics Inc,
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Affect of Wafer Height and Bow on Eddy Current Sheet Resistance Measurements
Mark Benjamin, Lehighton Electronics Inc, -
May 19, 2022 // 1:50pm
17.2 Top Surface Edge Contact for Wafer Level Electrical Characterization of 2DEG in AlGaN/GaN on Semi-insulating Wafers
Dmitriy Marinskiy, Semilab SDI, Tampa, FL,B. Schrayer, Semilab SDIMark Benjamin, Lehighton Electronics Inc,J. Lagowski, Semilab SDIMarshall Wilson, Semilab SDI, Tampa, FL,D. Nguyen, Semilab LEI, Lehighton, PADownload Paper