Mark Benjamin
Lehighton Electronics Inc,
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Affect of Wafer Height and Bow on Eddy Current Sheet Resistance Measurements
Mark Benjamin, Lehighton Electronics Inc, -
May 19, 2022 // 1:50pm
17.2 Top Surface Edge Contact for Wafer Level Electrical Characterization of 2DEG in AlGaN/GaN on Semi-insulating Wafers
Dmitriy Marinskiy, Semilab SDI, Tampa, FL,Bret Schrayer, Semilab SDI, Tampa, FL,Mark Benjamin, Lehighton Electronics Inc,Jacek Lagowski, Semilab SDI, Tampa, FL,Marshall Wilson, Semilab SDI, Tampa, FL,D. Nguyen, Semilab LEI, Lehighton, PA