Mark Benjamin

Lehighton Electronics Inc,

Affect of Wafer Height and Bow on Eddy Current Sheet Resistance Measurements

Mark Benjamin, Lehighton Electronics Inc,
May 19, 2022 // 1:50pm

17.2 Top Surface Edge Contact for Wafer Level Electrical Characterization of 2DEG in AlGaN/GaN on Semi-insulating Wafers

Dmitriy Marinskiy, Semilab SDI, Tampa, FL,

Bret Schrayer, Semilab SDI, Tampa, FL,

Mark Benjamin, Lehighton Electronics Inc,

Jacek Lagowski, Semilab SDI, Tampa, FL,

Marshall Wilson, Semilab SDI, Tampa, FL,

D. Nguyen, Semilab LEI, Lehighton, PA

Abstract

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