Marnix Tack
ON Semiconductor, Corp. R&D
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13.3 Recessing Process for Au-free Ohmic Contacts Formation on AlGaN/GaN Heterostructures with AlN Spacer
Aurore Constant, ON Semiconductor, Corp. R&DJoris Baele, ON Semiconductor, Corp. R&DPeter Coppens, ON Semiconductor, Corp. R&DFreddy De Pestel, ON Semiconductor, Corp. R&DPeter Moens, ON Semiconductor, Corp. R&DMarnix Tack, ON Semiconductor, Corp. R&D