Marzieh Bakhtiary Noodeh

Georgia Institute of Technology, Atlanta, GA
  • A Study of Low-Annealing-Temperature Ohmic Contact on n-Type GaN Layers

    Shyh-Chiang Shen, Georgia Institute of Technology, Atlanta, GA
    Minkyu Cho, Georgia Institute of Technology, Atlanta, GA
    Marzieh Bakhtiary Noodeh, Georgia Institute of Technology, Atlanta, GA
    Theeradetch Detchprohm, Georgia Tech
    Russell Dupuis, Georgia Tech
    Barry Wu, Keysight Technologies, Inc.
    Don D’Avanzo, Keysight Technologies, Inc.

    Typical n-type ohmic contact formation for GaN material systems requires high-temperature thermal processes. The high-temperature process often leads to a rough surface after the annealing step. Low-annealing-ohmic contact is advantageous to prevent undesired surface roughening on the metal stack during this thermal process.  We report an approach to achieve low contact resistance on n-type GaN layers using a nitrogen plasma and a conventional Ti/Al-based metal stacks.  We observed an as-deposit ohmic contact behavior on the n-type contact with a specific contact resistance (rc,sp) in the mid-E-6 Ω∙cm2 range.  The rc,sp was further reduced to  6.8E-7 Ω∙cm2 after an annealing step at 600 oC.

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  • May 12, 2022 // 3:20pm

    18.19 Reliability Study of Vertical GaN PIN Rectifiers and The Origin of Premature Breakdown

    Minkyu Cho, Georgia Institute of Technology, Atlanta, GA
    Marzieh Bakhtiary Noodeh, Georgia Institute of Technology, Atlanta, GA
    Theeradetch Detchphrom, Georgia Institute of Technology, Atlanta, GA
    Russell D. Dupuis, Georgia Institute of Technology, Atlanta, GA
    Shyh-Chiang Shen, Georgia Institute of Technology, Atlanta, GA
    Qinghui Shao, 2Lawrence Livermore National Laboratory, Livermore, CA
    Ted Laurence, 2Lawrence Livermore National Laboratory, Livermore, CA
    Matthias Daeumer, Lawrence Livermore National Laboratory, Livermore, CA
    Jae-Hyuck Yoo, Lawrence Livermore National Laboratory, Livermore, CA
    Zhiyu Xu, Georgia Institute of Technology, Atlanta, GA

    Student Presentation

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