Masatoshi Koyama

Osaka Institute of Technology

  • 11.1.5.2024 Electron-beam Deposition with Low- Spitting Platinum Source Material Improved by New Impurity Removal Processes

    Atsushi Kawashimo, Matsuda Sangyo Co., Ltd.
    Takahiro Kobayashi, Matsuda Sangyo Co., Ltd.
    Masatoshi Koyama, Osaka Institute of Technology
    Yuichiro Shindo, Matsuda Sangyo Co., Ltd.
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