Michael Blair

SPTS Technologies, Inc.

  • 9.4 Extending MTBC to High Productive Performance Levels in ICP SiN Etching for Advanced RF Applications

    Elena B Woodard, Skyworks Solutions, Inc., Newbury Park, CA
    Daniel K Berkoh, Skyworks Solutions, Inc., Newbury Park, CA
    Stephen Vargo, SPTS Technologies, Inc.
    Miki Takagi, SPTS Technologies, Inc.
    Michael Blair, SPTS Technologies, Inc.
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