Ming-Yih Kao
Qorvo, Inc.
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Set up and Characterization of an Optical Wide Stepper Process For DR15 Technology as a replacement for E-Beam Lithography
Amy Zhou, TriQuint Semiconductor, TXJerry Beene, TriQuint Semiconductor,TXMarcus King, TriQuint Semiconductor, TXMing-Yih Kao, Qorvo, Inc.Hua-Tang Chen, Qorvo, Inc.Chris Puckett, TriQuint Semiconductor