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N. Rezaei-Hartmann
LayTec AG
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6.2.3.2024 Plasma-Etch End-Pointing in InP-Based Laser Device Structures
Jean Decobert, III-V LabN. Vaissiere, III-V LabD. Micha, III-V LabD. Néel, III-V LabM. Binetti, LayTec AGA. Adrian, LayTec AGC. Lörchner-Gerdaus, LayTec AGD. Cornwell, LayTec AGN. Rezaei-Hartmann, LayTec AGT. Brand, LayTec AGA. Martinez, LayTec AGK. Haberland, LayTec AGJ.-T Zettler, LayTec AG