N. Vaissiere

III-V Lab

  • 6.2.3.2024 Plasma-Etch End-Pointing in InP-Based Laser Device Structures

    Jean Decobert, III-V Lab
    N. Vaissiere, III-V Lab
    D. Micha, III-V Lab
    D. Néel, III-V Lab
    M. Binetti, LayTec AG
    A. Adrian, LayTec AG
    C. Lörchner-Gerdaus, LayTec AG
    D. Cornwell, LayTec AG
    N. Rezaei-Hartmann, LayTec AG
    T. Brand, LayTec AG
    A. Martinez, LayTec AG
    K. Haberland, LayTec AG
    J.-T Zettler, LayTec AG

    [embeddoc url=”https://csmantech.org/wp-content/uploads/2024/06/6.2.3.2024-Plasma-Etch-End-Pointing-in-InP-Based-Laser-Device-Structures.pdf” download=”all”]