Abstract
In this work, the development of solar-blind ultraviolet detectors based on the AlGaN materials system is discussed. This development includes design, growth, characterization, fabrication, and packaging of devices in a vertically integrated environment. The advantage of keeping all major steps needed to realize the devices in-house is discussed with focus on process control and holistic device manufacturing. Finally, device properties including sensitivity and efficiency are presented and an outlook on future developments is given.
P. Reddy
Adroit Materials Inc.
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11A.4 – Vertically Integrated Development of AlGaN Based UV Detectors
R. Kirste, Adroit Materials Inc.P. Reddy, Adroit Materials Inc.W. Mecouch, Adroit Materials Inc.R. Collazo, North Carolina State UniversityZ. Sitar, Adroit Materials Inc, North Carolina State University
