Peter C Wood
SAMCO Inc.
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14.10 Fabrication of Hollow Structures Using Atomic Layer Deposition
Masayuki Nakamura, SAMCO Inc.Takayuki Kobayashi, SAMCO Inc.Tatsurou Sagawa, SAMCO inc.Shin-ichi MotoyamaKouichirou Yuki, Yamaguchi UniversityRyo Inomoto, Yamaguchi UniversityOsamu Tsuji, Yamaguchi UniversityKazuyuki Tadatomo, Yamaguchi UniversityPeter C Wood, SAMCO Inc.