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R. Fitch
Air Force Research Laboratory
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May 10, 2022 // 4:50pm
4.3 Transfer of the AFRL 0.14 μm AlGaN/GaN-on-SiC MMIC Process to MACOM’s Commercial Fab
G. Cueva, MACOME. Werner, KBR, Wright-Patterson AFBA. Islam, Air Force Research LaboratoryN. Miller, Air Force Research LaboratoryA. Crespo, Air Force Research Laboratory, Sensors DirectorateNicholas P. Sepelak, KBR, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USAD. Walker Jr., Air Force Research LaboratoryGary Hughes, Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OHR. Fitch, Air Force Research LaboratoryK. Chabak, Air Force Research Laboratory, Sensors DirectorateAndrew Green, Air Force Research Laboratory, Sensors DirectorateKyle Liddy, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USADownload Paper