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R. Pong
COHERENT - INNOViON
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May 12, 2022 // 11:50am
15.4 Ion Implantation Simulation and Optimization in Semiconductor Compounds
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5.1.2023 Isolation in Compound Semiconductors and the Risk of Neutron Generation with Implantation of Light Ions
J. A. Turcaud, Coherent Corp.C. Heckman, COHERENT - INNOViONV. Heckman, COHERENT - INNOViONA. Hassan, COHERENT - INNOViONR. Pong, COHERENT - INNOViONJ. Schuur, Coherent Corp.