Russ Westerman

Plasma-Therm, LLC

  • The Effects of Increasing the Aspect Ratio of GaAs Backside Vias

    Holly Rubin, Plasma-Therm LLC
    Dwarakanath Geerpuram, Plasma-Therm LLC
    Russ Westerman, Plasma-Therm, LLC

  • 13.4 Plasma Dicing on Tape for GaAs Based Devices

    Marco Notarianni, Plasma-Therm LLC
    Tsu-Wu Chiang, Plasma-Therm, LLC
    Christopher Johnson, Plasma-Therm LLC
    Russ Westerman, Plasma-Therm, LLC
    Thierry Lazerand, Plasma-Therm, LLC
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