S. Freyer

Ferdinand-Braun-Institute

  • Yield improvement of metal-insulator-metal capacitors in MMIC fabrication process based on AlGaN/GaN HFETs

    S. A. Chevtchenko, Ferdinand-Braun-Institut (FBH)
    S. Freyer, Ferdinand-Braun-Institute
    L. Weixelbaum, Ferdinand-Braun-Institute
    P. Kurpas, Ferdinand-Braun-Institut
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