3.1.3.2024 Optimization of AlScN Etch Processes Ensuring Minimum Bottom Electrode Loss
Samira Kazemi
KLA Corporation (SPTS Division)
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3.1.3.2024 Optimization of AlScN Etch Processes Ensuring Minimum Bottom Electrode Loss
Samira Kazemi, KLA Corporation (SPTS Division)Janet Hopkins, KLA Corporation (SPTS Division)