Sangmin Lee

Wavice Inc.
  • Qualification of Wavice Baseline GaN HEMT process with 0.4 um gate on 4” SiC wafers

    Hosang Kwon, Agency for Defense Development
    Sangmin Lee, Wavice Inc.
    Byoungchul Jun, Wavice Inc.
    Chulsoon choi, Wavice Inc.
    Hyeyoung Jung, Wavice Inc.
    Seokgyu Choi, Wavice Inc.
    Min Han, Wavice Inc.
    Ho Geun Lee, Wavice Inc.
    Myoungkeun Song, Wavice Inc.
    Sung Won Lee, Wavice Inc.
    Young Jae Kim, Wavice Inc.
    Jihun Kwon, Wavice Inc.
    Myoungsoo Park, Wavice Inc.
    Sewon Hwang, Wavice Inc.
    Hangyol Ji, Wavice Inc.

    The performance and reliability of AlGaN/AlN/GaN HEMT on 4 inch semi-insulating SiC substrate fabricated with baseline GaN HEMT process of Wavice Inc. have been reported. The baseline process of Wavice Inc. includes AlxGa1-xN/AlN/u-GaN/Fe-GaN epi structure with x=22%, Si+ ion implanted and recess etched ohmic, 0.4 um gate length, Ni based gamma Gate, electro plated void free source connected field plate (SCFP), 5 um thick electro plated interconnect metal, 85 um SiC substrate thickness after grinding, through SiC via directly to the source ohmic metal with sloped side wall, 7 um thick electro plated back side metal. To qualify the process technology, 3 non-consecutive lots were produced. DC/RF characterization and a list of reliability tests have been done on randomly selected devices.

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  • GaN-on-SiC MMIC Production for S-Band and EW-Band Applications

    Ryan Fury
    Scott Sheppard, Wolfspeed | A Cree Company
    Jeffrey B. Barner
    Bill Pribble
    Jeremy Fisher, Wolfspeed | A Cree Company
    Donald A. Gajewski
    Fabian Radulescu, Wolfspeed | A Cree Company
    Helmut Hagleitner
    Dan Namishia, Wolfspeed | A Cree Company
    Zoltan Ring
    Jennifer Gao, Wolfspeed | A Cree Company
    Sangmin Lee, Wavice Inc.
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  • Performance and Reliability of AlGaN/GaN HEMT o_blankn 100-mm SiC Substrate with Improved Epitaxial Growth Uniformity

    Sangmin Lee, Wavice Inc.
    Tim Kennedy
    Christer Hallin
    Helder Antunes
    Brian Fetzer
    Scott T. Sheppard
    Al Burk, Wolfspeed, A Cree Company
    Don A. Gajewski
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