Shiban Tiku

Skyworks Solutions, Inc.

  • An E-beam Evaporation Deposition Process for Tantalum Nitride Thin Film Resistors

    Lam Luu-Henderson, Skyworks Solutions Inc.
    Shiban Tiku, Skyworks Solutions, Inc.
    Hong Shen
    Richard Bingle
    Daniel Weaver
    Gary Hu
    Cristian Cismaru, Skyworks Solutions, Inc.
    Mike Sun, Skyworks Solutions, Inc.
    Skyworks Solutions
    formerly of Skyworks Solutions
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  • Plating Showerhead System for Improved Backside Wafer Plating

    Jens Riege, Skyworks Solutions, Inc.
    Heather Knoedler, Skyworks Solutions
    Shiban Tiku, Skyworks Solutions, Inc.
    Nercy Ebrahimi, Skyworks Solution Inc.

  • Collector Contact Optimization in GaAs HBT Manufacturing

    Lam Luu-Henderson, Skyworks Solutions Inc.
    Daniel Weaver
    Heather Knoedler, Skyworks Solutions
    Shiban Tiku, Skyworks Solutions, Inc.

  • 9.2 Impact of Loading Effect on Retrograde Profile of CAMP Negative Photoresist in Metal Lift-off Applications

    Sarang Kulkarni, Skyworks Solutions, Inc.
    Tom Brown, Skyworks Solutions, Inc.
    Shiban Tiku, Skyworks Solutions, Inc.
    Manjeet Singh, Skyworks Solutions, Inc.
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  • 9.3 Evolution and Challenges of a TaN Resistor Lift-off Process from a Lithography Perspective

    Tom Brown, Skyworks Solutions, Inc.
    Shiban Tiku, Skyworks Solutions, Inc.
    Sarang Kulkarni, Skyworks Solutions, Inc.
    Manjeet Singh, Skyworks Solutions, Inc.
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  • Methods of Improving and Optimizing Isolation Implantation for Stacked HBT on HEMT Epitaxial GaAs Semiconductor Devices

    Shiban Tiku, Skyworks Solutions, Inc.
    Sasha Kurkcuoglu, Skyworks Solutions, Inc.

    The issues of achieving good isolation and low leakage for complex integrated circuits such as stacked HBT on HEMT (BiHEMT) epitaxial GaAs semiconductor devices are described in this paper. The need for achieving a balance between short cycle time and optimum performance by use of appropriate ion implant species and schedules (energy/dose) are discussed in detail.

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