Shinya Fujiwara

Sumiden Semiconductor Materials Co., Ltd.

  • 5b.1 Crystal growth and wafer processing of Indium Phosphide 6″ substrate

    Tomonori Morishita, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd
    Kazuaki Kounoike, Sumiden Semiconductor Materials Co., Ltd.
    Shinya Fujiwara, Sumiden Semiconductor Materials Co., Ltd.
    Yoshiaki Hagi, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, Itami
    Yoshiki Yabuhara, Sumitomo Electric Industries, Ltd, Itami
    Download Paper