Shuai Yang

Institute of Semiconductors, Chinese Academy of Sciences

  • 10.4 Impact of device parameter on performance of SAW resonators on AlN/sapphire

    Shuai Yang, Institute of Semiconductors, Chinese Academy of Sciences
    Yun Zhang, Institute of Semiconductors, Chinese Academy of Sciences, Beijing
    Zhe Cheng, Institute of Semiconductor, Chinese Academy of Sciences, Beijing
    Lian Zhang, Institute of Semiconductor, Chinese Academy of Sciences, Beijing
    Junxi Wang, Institute of Semiconductor, Chinese Academy of Sciences, Beijing
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