Shuichi Kaneko

Sumiden Semiconductor Materials Co., Ltd, Kobe

  • 14.6 Development of Si-doped 8-inch GaAs substrates

    Masanori Morishita, Sumiden Semiconductor Materials Co., Ltd, Kobe
    Hidetoshi Takayama, Sumiden Semiconductor Materials Co., Ltd, Kobe
    Shuichi Kaneko, Sumiden Semiconductor Materials Co., Ltd, Kobe
    Hirokazu Ota, Sumiden Semiconductor Materials Co., Ltd, Kobe
    Tatsuya Moriwake, Sumiden Semiconductor Materials Co., Ltd, Kobe
    Satoshi Horikawa, Sumitomo Electric Industries, Ltd, Itami
    Kouji Morishige, Sumitomo Electric Industries, Ltd, Itami
    Yoshiaki Hagi, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, Itami
    Yoshiki Yabuhara, Sumitomo Electric Industries, Ltd, Itami
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