Stephanie Chang
Skyworks Solutions Inc.
-
May 10, 2022 // 5:30pm
5.5 Optimizing Process Conditions for High Uniformity and Stability of Tantalum Nitride Films Stephanie Chang, Shiban Tiku, and Lam Luu-Henderson
Shiban K. Tiku, Skyworks Solutions, Inc.Lam Luu-Henderson, Skyworks Solutions Inc.Stephanie Chang, Skyworks Solutions Inc.Download PaperLoading...