Steve Golovato**
* Materion Microelectronics and Services
** NEXX Systems
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PVD Magnetron Sputtering Parameters and their Effect on the Composition of AuSn Solder
Heiner Lichtenberger*, * Materion Microelectronics and Services ** NEXX SystemsAlan DuckhamSteve Golovato**, * Materion Microelectronics and Services ** NEXX Systems