Sudarshan Natarajan
Momentive Performance Materials
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20.4 Carbide Coatings for MOCVD Wafer Carrier Protection
Hao Qu, Momentive Performance MaterialsWei Fan, Momentive Performance Materials IncSudarshan Natarajan, Momentive Performance MaterialsCreighton Tomek, Momentive Performance MaterialsGregory Shaffer, Momentive Performance MaterialsB. Kozak, Momentive Technologies -
14.2 TaC Coated Wafer Carrier for GaN MOCVD for Blue Light-Emitting Diodes
Hao Qu, Momentive Performance MaterialsWei Fan, Momentive Performance Materials IncAshwin Rishinaramangalam, Center for High Technology Materials, Department of Electrical Engineering, University of New MexicoMorteza Monavarian, Center for High Technology Materials, Department of Electrical Engineering, University of New MexicoDaniel Feezell, Center for High Technology Materials, Department of Electrical Engineering, University of New MexicoSudarshan Natarajan, Momentive Performance MaterialsCreighton Tomek, Momentive Performance MaterialsGregory Shaffer, Momentive Performance MaterialsB. Kozak, Momentive Technologies