T. Brand

LayTec AG

  • 6.2.3.2024 Plasma-Etch End-Pointing in InP-Based Laser Device Structures

    Jean Decobert, III-V Lab
    N. Vaissiere, III-V Lab
    D. Micha, III-V Lab
    D. Néel, III-V Lab
    M. Binetti, LayTec AG
    A. Adrian, LayTec AG
    C. Lörchner-Gerdaus, LayTec AG
    D. Cornwell, LayTec AG
    N. Rezaei-Hartmann, LayTec AG
    T. Brand, LayTec AG
    A. Martinez, LayTec AG
    K. Haberland, LayTec AG
    J.-T Zettler, LayTec AG
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