T. Higuchi

Momentive Technologies
  • May 12, 2022 // 3:20pm

    18.3 Heater Performance Improvement with Ceramic Coatings for GaN MOCVD Process

    T. Yamamoto, Momentive Technologies
    B. Kozak, Momentive Technologies
    Y. Morikawa, Momentive Technologies
    T. Higuchi, Momentive Technologies
    Y. Matsui, Momentive Technologies
    D. Sabens, Momentive Technologies
    P. Schmidt-Sane, Momentive Technologies
    J. lennartz, Momentive Technologies
    W. Fan, Momentive Technologies
    C. Chen, Momentive Technologies

    Abstract

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