Vallen Rezazadeh
University of Alberta
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6a.1 Plasma-Enhanced ALD for Improved MOS Interfaces in III-V Semiconductors
Vallen Rezazadeh, University of AlbertaKyle Bothe, University of AlbertaAmir Afshar, University of AlbertaKenneth Cadien, University of AlbertaDouglas Barlage, University of Alberta