Student Presentation
X. Huang
Argonne National Laboratory
-
May 12, 2022 // 3:20pm
18.6 Chemical Mechanical Polishing of β-Ga2O3
M.S. Goorsky, University of California, Los AngelesM. E. Liao, University of California, Los Angeles, CA USAK. Huynh, University of California, Los AngelesW. Olsen, University of California, Los Angeles, CA USAX. Huang, Argonne National LaboratoryM. Wojcik, Argonne National LaboratoryJ. C. Gallagher, U.S. Naval Research LaboratoryY. Wang, University of California, Los Angeles, CA USADownload Paper