Y. Sakano

Samco Inc.

  • Recess Etching Process for AlGaN/GaN-HFET Devices Using In-Situ Monitoring

    T. Nishimiya, Samco Inc.
    Y. Sakano, Samco Inc.
    H. Ogiya, Samco Inc.
    M. Hiramoto, Samco Inc.
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