Abstract
In this paper, we report 6-inch indium phosphide (InP) substrates with very low dislocation density produced using SEI’s Vertical Boat (VB) method. The growth conditions have been optimized to reduce crystal defects.
Y. Yoshizumi
Sumiden Semiconductor Materials Co Sumitomo Electric Industries
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16.4 Development of Non-Core 4-inch GaN Substrate
Download PaperHideki Osada, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesY. Yoshizumi, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesK. Uematsu, Sumitomo Electric Industries, Ltd.S. Minobe, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesF. Sato, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesF. Nakanisihi, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesY. Yamamoto, Sumitomo Electric Industries, Ltd.Y. Yabuhara, Sumiden Semiconductor Materials Co Sumitomo Electric Industries -
7A.2 – Development of 6-Inch Indium Phosphide Substrates
Y. Oeki, Sumiden Semiconductor Materials Co., Ltd.K. Aoyama, Sumiden Semiconductor Materials Co., Ltd.,K. Hashio, Sumiden Semiconductor Materials Co., Ltd.,M. Adachi, Sumiden Semiconductor Materials Co., Ltd.,Y. Yoshizumi, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesYoshiaki Hagi, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, ItamiTomonori Morishita, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd
