Yasushi Iyechika

NuFlare Technology, Inc.

  • 8.2 Single-wafer Multi-Reactor MOCVD Tool for GaN Based Devices

    Yasushi Iyechika, NuFlare Technology, Inc.
    Hideshi Takahashi, NuFlare Technology, Inc.
    Shinichi Mitani, NuFlare Technology, Inc.
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