Yoshiaki Hagi
Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, Itami
-
14.6 Development of Si-doped 8-inch GaAs substrates
Download PaperMasanori Morishita, Sumiden Semiconductor Materials Co., Ltd, KobeHidetoshi Takayama, Sumiden Semiconductor Materials Co., Ltd, KobeShuichi Kaneko, Sumiden Semiconductor Materials Co., Ltd, KobeHirokazu Ota, Sumiden Semiconductor Materials Co., Ltd, KobeTatsuya Moriwake, Sumiden Semiconductor Materials Co., Ltd, KobeSatoshi Horikawa, Sumitomo Electric Industries, Ltd, ItamiKouji Morishige, Sumitomo Electric Industries, Ltd, ItamiYoshiaki Hagi, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, ItamiYoshiki Yabuhara, Sumitomo Electric Industries, Ltd, Itami -
5b.1 Crystal growth and wafer processing of Indium Phosphide 6″ substrate
Download PaperTomonori Morishita, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, LtdKazuaki Kounoike, Sumiden Semiconductor Materials Co., Ltd.Shinya Fujiwara, Sumiden Semiconductor Materials Co., Ltd.Yoshiaki Hagi, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, ItamiYoshiki Yabuhara, Sumitomo Electric Industries, Ltd, Itami -
16.4 Development of Non-Core 4-inch GaN Substrate
Download PaperHideki Osada, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesY. Yoshizumi, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesK. Uematsu, Sumitomo Electric Industries, Ltd.S. Minobe, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesF. Sato, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesF. Nakanisihi, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesY. Yamamoto, Sumitomo Electric Industries, Ltd.Y. Yabuhara, Sumiden Semiconductor Materials Co Sumitomo Electric Industries -
17.2.2023 Development of Laser Diode Grade Si-doped 8-inch GaAs Substrates
K. Shibata, Sumiden Semiconductor Materials Co., Ltd.,K. Aoyama, Sumiden Semiconductor Materials Co., Ltd.,M Nishioka, Sumiden Semiconductor Materials Co., Ltd.,K. Hashio, Sumiden Semiconductor Materials Co., Ltd.,F. Adachi, Sumiden Semiconductor Materials Co., Ltd.,S. Fujita, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, LtdYoshiaki Hagi, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, ItamiTomonori Morishita, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd -
7A.2 – Development of 6-Inch Indium Phosphide Substrates
Y. Oeki, Sumiden Semiconductor Materials Co., Ltd.K. Aoyama, Sumiden Semiconductor Materials Co., Ltd.,K. Hashio, Sumiden Semiconductor Materials Co., Ltd.,M. Adachi, Sumiden Semiconductor Materials Co., Ltd.,Y. Yoshizumi, Sumiden Semiconductor Materials Co Sumitomo Electric IndustriesYoshiaki Hagi, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, Ltd, ItamiTomonori Morishita, Sumiden Semiconductor Materials Co., Ltd., Sumitomo Electric Industries, LtdAbstract
In this paper, we report 6-inch indium phosphide (InP) substrates with very low dislocation density produced using SEI’s Vertical Boat (VB) method. The growth conditions have been optimized to reduce crystal defects.
