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Yun Lai
Eta Research
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May 12, 2022 // 3:20pm
18.5 Warp of 4” Free-standing GaN Wafers
Xiaorong Luo, University of Electronic Science and Technology of China, Chengdu, ChinaY. Yang, Global Communication Semiconductors, LLCTroy Baker, Eta ResearchJinfeng Tang, Eta ResearchYun Lai, Eta ResearchDownload Paper