10.1.2023 Mechanisms and Control of Photolithography Hotspots in Compound Semiconductor Manufacturing

Mark J. Miller, Skyworks Solutions Inc.
Marietta L. Balandan, Skyworks Solutions Inc.,
Aida J. Castro, Skyworks Solutions, Inc.
Lorain Ross, Skyworks Solutions, Inc.
M. Arif Zeeshan, Skyworks Solutions Inc.

10.1.2023 – Miller Paper