10.1.2023 Mechanisms and Control of Photolithography Hotspots in Compound Semiconductor Manufacturing

M. J. Miller, Skyworks Solutions Inc.
Marietta L. Balandan, Skyworks Solutions Inc.,
Aida J. Castro, Skyworks Solutions, Inc.
Lorain Ross, Skyworks Solutions, Inc.
M. A. Zeeshan, Skyworks Solutions Inc.

10.1.2023 – Miller Paper