Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitors
Authors
Digests
Contact
Attendee/Exhibitor Registration
Hotel Registration
Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitors
Authors
Digests
Contact
Attendee/Exhibitor Registration
Hotel Registration
10.2.2023 Reduction in Scattered Particles Contamination in Inductively Coupled Plasma Etching Systems for High Volume High Yield Production
Mohammadsadegh Beheshti, Skyworks Solutions Inc.
Samuel Mony, Skyworks Solutions, Inc.
Nercy Ebrahimi, Skyworks Solution Inc.
Tom Brown, Skyworks Solutions, Inc.
10.2.2023 – Beheshti Paper