11.2.1.2024 Defect Reduction and Yield Improvement of MIM Capacitors

S. A. Chevtchenko, Ferdinand-Braun-Institut (FBH)
I. Ostermay, Ferdinand-Braun-Institut (FBH)
S. Troppenz, Ferdinand-Braun-Institut (FBH)
J. Würfl, Ferdinand-Braun-Institut (FBH)
O. Hilt, Ferdinand-Braun-Institut (FBH)
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