11.2.1.2024 Defect Reduction and Yield Improvement of MIM Capacitors

S. A. Chevtchenko, Ferdinand-Braun-Institut (FBH)

I. Ostermay, Ferdinand-Braun-Institut (FBH)

S. Troppenz, Ferdinand-Braun-Institut (FBH)

J. Würfl, Ferdinand-Braun-Institut (FBH)

O. Hilt, Ferdinand-Braun-Institut (FBH)

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