11.6.2023 Sonic Lift-off (SLO) to Enable Substrate Reuse and Lower Manufacturing Cost

P. GuimerĂ¡ Coll, Crystal Sonic Inc.
T. Black, Crystal Sonic Inc.
A.P. Merkle, Crystal Sonic Inc.
L. Bathurst, Crystal Sonic Inc.
M. Bertoni, Crystal Sonic Inc.

11.6.2023_Coll_Paper_Sonic Lift-off (SLO) to Enable Substrate Reuse and Lower Manufacturing Cost