15.5.2023 Scalable Selective Area Doping for Manufacturing of Planar Vertical Power GaN Devices

Alan Jacobs, U.S. Naval Research Laboratory

Boris N. Feigelson, Naval Research Laboratory

Jennifer Hite, U.S. Naval Research Laboratory

Joseph Spencer, U.S. Naval Research Laboratory

Marko Tadjer, U.S. Naval Research Laboratory

Daniel G. Georgiev, University of Toledo, Toledo OH

Raghav Khanna, University of Toledo, Toledo OH

Marko J. Tadjer, U.S. Naval Research Laboratory

Travis J. Anderson, U.S. Naval Research Laboratory