18.13.2023 Design and Optimization of 1.2 kV SiC Trench MOSFETs Using a Tilted Ion Implantation Process for High Breakdown Voltage

Yeongeun Park, Kumoh National Institute of Technology
Hyowon Yoon, Kumoh National Institute of Technology
Chaeyun Kim, Kumoh National Institute of Technology, Republic of Korea
Gyuhyeok Kang, Kumoh National Institute of Technology
Ogyun Seok, Kumoh National Institute of Technology, Republic of Korea

18.13.2023 Park_v2 final